KrF photoresist resin, photoresist monomers, PAG
Dakenchem has very deep research in the photoresist resin area, and on this page, we will list our products for the KrF photoresist resin, photoresist monomers and PAG.
- KrF photoresist resin -
1. VP-H series resin
Dakenchem VP-H series resin
| Resin series | Resin Model | Structure | PDI | Mw |
| VP-H Series | VP-3500/H |  |
< 1.1 | 3500 |
| VP-5000/H | 5000 | |||
| VP-8000/H | 8000 | |||
| VP-11000/H | 11000 | |||
| VP-15000/H | 15000 | |||
| VP-19000/H | 19000 | |||
| VP-****/H | >1.2 | xxxx |
Note: H refers to homopolymer , “****” means it can be customized.
| VP-H series resin Specification | |
| Appearance | Light yellow liquid |
| Solid | < 40% |
| Solvents | Propylene glycol methyl ether acetate |
| Moisture | <0.2% |
| Solvent residue | <200ppm |
| Monomer residue | <200ppm |
| Single gold | <10ppb |
| Particles ( >2μm ) | <100 cells /mL |
2. VP-A series resin
Dakenchem VP-A series resin products
| Resin series | Resin Model | Structure | x:y | PDI | Mw |
| VP-A Series | VP-6000/A |  |
85:15 70:30 65:35 X:Y |
< 1.1 | 6000 |
| VP-9000/A | 9000 | ||||
| VP-13000/A | 13000 | ||||
| VP-15000/A | 15000 | ||||
| VP-17000/A | 17000 | ||||
| VP-21000/A | >1.5 | 21000 | |||
| VP-****/A | xxxx |
Note: A refers to Acetal-polymer ; “****” means it can be customized.
Dakenchem VP-A series resin specifications
| Appearance | Light yellow liquid |
| Solid | < 40% |
| Solvents | Propylene glycol methyl ether acetate |
| Moisture | <0.2% |
| Solvent residue | <200ppm |
| Monomer residue | <200ppm |
| Single gold | <5ppb |
| Protection group ratio deviation | 1% |
| Particles ( >2μm ) | <100 cells /mL |
3. VP-B series resin
Dakenchem VP-B series resin products
| Resin series | Resin Model | Resin Structure | x:y | PDI | Mw |
| VP-B Series | VP-6500/B |  |
80:20 65:35 |
≤ 1.1 | 6500 |
| VP-9500/B | 9500 | ||||
| VP-13000/B | 13000 | ||||
| VP-17000/B | 17000 | ||||
| VP-***/B | **** | ||||
| VP-12000/B | ≥ 1.5 | 12000 | |||
| VP-15000/B | 15000 | ||||
| VP-19000/B | 19000 | ||||
| VP-***/B | **** |
Note: B refers to Boc-polymer tBoc polymer; “****” means it can be customized.
Dakenchem VP-B series resin specifications
| Appearance | Light yellow liquid |
| Solid | < 40% |
| Solvents | PGMEA |
| Moisture | <0.2% |
| Solvent residue | <200ppm |
| Monomer residue | <200ppm |
| Single gold | <10ppb |
| Protection group ratio deviation | 2% |
| Particles ( >2μm ) | <100 cells /mL |
4. VP-C series resin
Dakenchem VP-C series resin
products
| Resin series | Resin Model | Resin Structure | x:y:z | PDI | Mw |
| VP-C Series | VP-8000/C |  |
67:16:17 60:20:20 |
1.4~1.6 | 8000 |
| VP-9500/C | 9500 | ||||
| VP-11000/C | 11000 | ||||
| VP-13000/C | 13000 | ||||
| VP-15000/C | 15000 | ||||
| VP-17000/C | 17000 | ||||
| VP-20000/C | 20000 | ||||
| VP-****/C | X:Y:Z | **** |
Note: C refers to copolymer ; “****” means it can be customized.
Dakenchem VP-C series resin specifications
| Appearance | Light yellow liquid |
| Solid | < 40% |
| Solvents | Propylene glycol methyl ether acetate |
| Moisture | <0.2% |
| Solvent residue | <200ppm |
| Monomer residue | <200ppm |
| Single gold | < 1ppb |
| Monomer unit deviation | 2% |
| Particles ( >2μm ) | <100 cells /mL |
4. VP-C series resin
Dakenchem VP-C series resin
products
| Resin series | Resin Model | Resin Structure | x:y:z | PDI | Mw |
| VP-C Series | VP-6500/C |  |
65:10:25 70:10:20 75:5:20 X:Y:Z |
<1.2 | 6500 |
| VP-9500/C | 9500 | ||||
| VP-13000/C | 13000 | ||||
| VP-17500/C | 17500 | ||||
| VP-19000/C | > 1.4 | 19000 | |||
| VP-21000/C | 21000 | ||||
| VP-23000/C | 23000 | ||||
| VP-****/C | **** |
Note: C refers to copolymer ; “****” means it can be customized.
Dakenchem VP-C series resin specifications
| Appearance | Light yellow liquid |
| Solid | < 40% |
| Solvents | PGMEA |
| Moisture | <0.2% |
| Solvent residue | <200ppm |
| Monomer residue | <200ppm |
| Single gold | < 5ppb |
| Deviation of acetal protecting group ratio | 1% |
| Boc protecting group ratio | 2% |
| Particles ( >2μm ) | <100 cells /mL |
4. VP-C series resin
Dakenchem VP-C series resin
products
| Resin series | Resin Model | Resin Structure | x:y:z | Mw |
| VP-C Series | VP-10500/C |  |
60:15:25 | 10500 |
| VP-9500/0C |  |
50:30:20 | 9500 | |
| VP-****/C | **** | **** | **** |
Note: C refers to copolymer ; “****” means it can be customized.
Dakenchem VP-C series resin specifications
| Appearance | Colorless transparent liquid |
| PDI | 1.60 + 0.10 |
| Solid | < 40% |
| Solvents | PGMEA |
| Moisture | <0.2% |
| Solvent residue | <200ppm |
| Monomer residue | <200ppm |
| Single gold | <10ppb |
4. VP-C series resin
Dakenchem VP-C series resin
products
| Product series | Product Model | Structure | x:y:z | Mw |
| VP-C Series | VP-10000/C | 60:20:20 65:15:20 x:y:z |
10000 | |
| VP-15000/C | 15000 | |||
| VP-****/C |
Note: C refers to copolymer ; “****” means it can be customized.
Dakenchem VP-C series resin specifications
| Appearance | Colorless transparent liquid |
| PDI | 1.45 + 0.05 |
| Solid | < 40% |
| Solvents | PGMEA |
| Moisture | <0.2% |
| Solvent residue | <200ppm |
| Monomer residue | <200ppm |
| Single gold | <10ppb |
4. VP-C series resin
Dakenchem VP-C series resin
products
| Resin series | Resin Model | Structure | x:y:z | Mw |
| VP-C Series | VP-15000/C | 65:15:20 55:15:30 x:y:z |
15000 | |
| VP-25000/C | 25000 | |||
| VP-****/C |
Note: C refers to copolymer ; “****” means it can be customized.
Dakenchem VP-C series resin specifications
| Appearance | Colorless transparent liquid |
| PDI | 1.45 + 0.05 |
| Solid | < 45% |
| Solvents | PGMEA |
| Moisture | <0.2% |
| Solvent residue | <200ppm |
| Monomer residue | <200ppm |
| Single gold | <10ppb |
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